Technology2020sNetherlandshigh confidence

An extreme ultraviolet lithography machine costs more than $100 million and is made solely by ASML in the Netherlands.

Notes on verification

Multiple independent, contemporaneous sources (Reuters, CNBC, Motley Fool, Asia Times, Georgetown CSET) corroborate both the price point (>$100M, ~$150M at the time) and ASML's status as sole manufacturer of EUV lithography machines. [tier=silver indep_score=0.833 clusters=6 claim_tier=notable | kind=empirical eligibility=high]

Sources